Zhou, P.,
Xu, Y.,
Simon, T.,
Fernandez-Zapico, M. E.,
Ma, W. W. &
Cui, T.,
2024,
IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. Institute of Electrical and Electronics Engineers Inc.,
p. 1130-1133 4 p. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution