High frequency dielectric properties of thin-film pzt capacitors

W. Williamson, B. K. Gilbert, H. D. Chen, K. R. Udayakumar, L. E. Cross, C. M. Bozler

Research output: Contribution to journalArticlepeer-review

11 Scopus citations


We present a method for calculating the dielectric constant and the dissipation factor for thin-film ferroelectric capacitors from scattering parameter measurements at multi-gigahertz frequencies. Physical measurement is discussed along with description of the model upon which the calculation is based. Experimental results for 0.5 micron films of PZT are reported up to 15 GHz. Direct measurement is compared with indirectly calculated values at the 100 MHz to 1.5 GHz range, showing excellent agreement.

Original languageEnglish (US)
Pages (from-to)335-342
Number of pages8
JournalIntegrated Ferroelectrics
Issue number1-4
StatePublished - Oct 1995

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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