Development of individually-addressable parylene microtube arrays

Yuefa Li, Hongen Tu, Raymond Iezzi, Paul Finlayson, Yong Xu

Research output: Contribution to journalArticlepeer-review

13 Scopus citations


This paper reports a novel technology of microfabricating out-of-plane parylene microtube arrays with integrated in-plane microchannels. The integrated microchannels enable the individual addressing of the microtubes. These devices permit the delivery of chemicals with controlled temporal and spatial patterns and facilitate the study of neurotransmitter-based retinal prosthesis. To fabricate these devices, through-silicon vias and horizontal trenches are first created by deep reactive-ion etching and isotropic XeF2 etching. Then, the parylene microtubes and microchannels are simultaneously formed by depositing parylene inside the vias and trenches conformally. Two types of devices have been fabricated and characterized. One type of device is rigid with microtube arrays and microchannels fabricated on the same chip. The other type is flexible, integrated with flexible parylene cables, which can be used for in vivo animal study of retinal prosthesis.

Original languageEnglish (US)
Article number115005
JournalJournal of Micromechanics and Microengineering
Issue number11
StatePublished - Nov 2011

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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